Nano-optical gratings for integrated laser interferometer arrays

In this contribution we show that binary nano-optical gratings in the resonance domain are ideal elements to build up such integrated interferometers. By means of symmetry considerations the grating's requirements for an ideal operation of the interferometer are determined. Utilizing the resonance behaviour of such nano-structures an interferometer operation close to the theoretical limits is reachable. A modal analysis reveals the basic effects causing the special responses of the gratings. The gratings are fabricated by electron-beam lithography and accompanied technology.