Machine Tool and Technology for Manufacturing of Micro-structures by Micro Dry Electrical Discharge Milling

This paper presents a new machine tool concept for micro dry electrical discharge milling. It includes two different motion systems, EDM spindle and EDM generator, as well as the control system. The feed motion is realised with high-precision linear axes and the high-dynamic motion, needed for the gap width control, with a two axes piezo unit. A control system is based on the Open Source development platforms. It includes several microcontrollers, with each controlling individual subsystems of the machine. The hybrid EDM generator is based on the high speed GaN FET transistors, which allow to control charging and discharging phase of the capacitor without using resistance.