Investigations on piezoelectric behaviour of aluminium nitride thin films for high frequency smart ultrasonic sensors systems

2011

Conference Paper

Author(s)

Herzog, T.

Walter, S.

Heuer, H.

Mainwork

Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM

Conference

European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2011