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Three-dimensional simulation of topography and doping processes at FhG
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1995
Book Article
Title
Three-dimensional simulation of topography and doping processes at FhG
Author(s)
Lorenz, J.
Bär, E.
Burenkov, A.
Fraunhofer-Institut für Integrierte Schaltungen IIS
Henke, W.
Tietzel, K.
Weiß, M.
Mainwork
3-dimensional process simulation
Language
English
IIS-B
