English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Structured deposition of SiO2 and poly-Si by Ar+ -Laser pyrolysis
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1986
Conference Paper
Title
Structured deposition of SiO2 and poly-Si by Ar+ -Laser pyrolysis
Author(s)
Sigmund, H.
Metzger, M.
Stumpff, C.
Mainwork
E-MRS Meeting 1986. Proceedings
Conference
European Materials Research Society (Meeting) 1986
Language
English
IFT
