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  4. Requirements for inert polymer layer for sensor applications
 
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1994
Conference Paper
Title

Requirements for inert polymer layer for sensor applications

Abstract
For encapsulation of chemical sensors different polymers were tested. Polymer process have to be a part of the sensor technology. The measurements of electrical parameters in electrolyte solution are important for polymer valuation. The tested polymer types Cyclotene and thermoplastic-modified Silicon Rubber realize the requirements for ISFETsensors.
Author(s)
Kunath, C.
Kurth, E.
Grundke, W.
Köhler, R.
Kück, H.
Mainwork
European MCM Workshop '94  
Conference
European MCM Workshop 1994  
Language
English
IMS2  
Keyword(s)
  • chemischer sensor

  • ISFET

  • Meßaufnehmer

  • polymer

  • sensor

  • sensortechnik

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