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1998
Journal Article
Title
Studies on synthesis of aluminium containing layer systems on steel and cerm substrates by PACVD
Abstract
The deposition of aluminium containing, especially aluminium oxide coatings steel and cermetswas performed by the plasma assisted chemical vapour deposition (PACVD) process using ametallo-organic compound (AlH3.NEt3) as precursor. The usefulness of the precursor in thePACVD process was investigated. The deposition process of non-conducting aluminium oxidelayers was developed by pulse DC-PACVD. Optical emission spectroscopy (OES) was used forin situ process control. The investigation by OES enables the identification of the species in thedischarge (Al and other) and thus supports the successful process development. The structure,chemical composition, bonding types in the layers, hardness, adhesion, roughness, frictioncoefficient and friction behaviour by a pin on the disk test have been investigated. The layersconsist of Al, O and traces of carbon using the metallo-organic precursor. The friction coefficientis >50% less compared to an uncoated steel substrate up to the breaki ng through of the layerby a pin on the disk test.