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High-throughput microreactor fabricated in silicon for chemical and biological engineering
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2005
Conference Paper
Title
High-throughput microreactor fabricated in silicon for chemical and biological engineering
Author(s)
Keoschkerjan, R.
Wenninger, F.
Richter, M.
Mainwork
Micro System Technologies 2005
Conference
International Conference on Micro Electro, Opto, Mechanical Systems & Components 2005
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
