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  4. Polishing of optical media by dielectric barrier discharge inert gas plasma at atmospheric pressure
 
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2013
Journal Article
Title

Polishing of optical media by dielectric barrier discharge inert gas plasma at atmospheric pressure

Abstract
In this paper, surface smoothing of optical glasses, glass ceramic and sapphire using a low-power dielectric barrier discharge inert gas plasma at atmospheric pressure is presented. For this low temperature treatment method, no vacuum devices or chemicals are required. It is shown that by such plasma treatment the micro roughness and waviness of the investigated polished surfaces were significantly decreased, resulting in a decrease in surface scattering. Further, plasma polishing of lapped fused silica is introduced. Based on simulation results, a plasma physical process is suggested to be the underlying mechanism for initialising the observed smoothing effect.
Author(s)
Gerhard, C.
Weihs, T.
Luca, A.
Wieneke, S.
Viöl, W.
Journal
Journal of the European Optical Society  
Open Access
DOI
10.2971/jeos.2013.13081
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
Keyword(s)
  • atmospheric pressure plasma

  • polishing

  • optical glasses

  • glass ceramic

  • sapphire

  • scattering

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