Machine integrated telecentric surface metrology in laser structuring systems

The laser structuring is an innovative technology used in a broad spectrum of industrial branches. There is however a market trend to smaller and more accurate micro structures, which demands a higher level of precision and efficiency. In this terms, an inline inspection is necessary, in order to improve the process through a closed-loop control and early defect detection. Within this paper an optical measurement system for inline inspection of micro and macro surface structures is described. Measurements on standards and technical surfaces are presented, which underline the potential of this technique for inline surface inspection of laser structured surfaces.