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A novel approach for increasing the strength of an Au/Si eutectic bonded interface on an oxidized silicon surface
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2012
Journal Article
Title
A novel approach for increasing the strength of an Au/Si eutectic bonded interface on an oxidized silicon surface
Author(s)
Haubold, M.
Lin, Y.
Frömel, J.
Wiemer, Maik
Esashi, M.
Geßner, Thomas
Journal
Microsystem Technologies
DOI
10.1007/s00542-012-1440-1
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
