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Advanced silicon bulk micromachining for angular rate sensor
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1999
Conference Paper
Title
Advanced silicon bulk micromachining for angular rate sensor
Author(s)
Wiemer, M.
Hiller, K.
Gessner, T.
Billep, D.
Ryrko, B.
Breng, U.
Zimmermann, S.
Gutmann, W.
Mainwork
Sensor '99. Proceedings. Vol.2
Conference
Sensor 1999
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM