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Ultra precision machine-integrated approach to measuring aspheres interferometrically
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2008
Conference Paper
Title
Ultra precision machine-integrated approach to measuring aspheres interferometrically
Author(s)
Uhlmann, E.
Kurz, M.
Bosse, M.
Neubert, R.
Bluemel, T.
Oberschmidt, D.
Mainwork
European Society for Precision Engineering and Nanotechnology, EUSPEN 2008. Vol.2
Conference
European Society for Precision Engineering and Nanotechnology (EUSPEN International Conference) 2008
Language
English
Fraunhofer-Institut für Produktionsanlagen und Konstruktionstechnik IPK
Keyword(s)
Ultrapräzisions-Zerspanung
Messtechnik