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Surface-micromachined piezoresistive pressure sensor
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1995
Conference Paper
Title
Surface-micromachined piezoresistive pressure sensor
Author(s)
Lisec, T.
Stauch, H.
Wagner, B.
Mainwork
Sensor '95. Proceedings
Conference
Sensor 1995
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
