2007
Conference Paper
Title

Roughness improvement of the COSi2/Si-interface for an application as buried silicide

Author(s)
Zimmermann, S.
Zhao, Q.T.
Höhnemann, H.
Wiemer, M.
Kaufmann, C.
Mantl, S.
Dudek, V.
Gessner, T.
Mainwork
Conference
DOI
Language
English