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Recent progress in CMOS integrated MEMS AO mirror development
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2007
Conference Paper
Title
Recent progress in CMOS integrated MEMS AO mirror development
Author(s)
Gehner, A.
Schmidt, J.U.
Wildenhain, M.
Knobbe, J.
Wagner, M.
Mainwork
Adaptive optics for industry and medicine
Conference
International Workshop on Adaptive Optics in Industry and Medicine 2007
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS