Options
2003
Conference Proceeding
Title
Silicon nitride and silicon dioxide thin insulating films VII
Title Supplement
Proceedings of the international symposium. Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films to be held April 28 - May 2, in Paris as part of the 203rd meeting of the Electrochemical Society (ECS)
Person Involved
Corporate Author
Electrochemical Society -ECS-, Dielectric Science and Technology Division
Electrochemical Society -ECS-, Electronics Division