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Laser micromachining for applications in thin film technology
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2000
Journal Article
Title
Laser micromachining for applications in thin film technology
Author(s)
Pfleging, W.
Ludwig, A.
Seemann, K.
Preu, Ralf
Mäckel, H.
Glunz, Stefan W.
Journal
Applied surface science
DOI
10.1016/S0169-4332(99)00468-7
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE
