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Determination of residual stresses by fib-DAC methodology
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2014
Book Article
Title
Determination of residual stresses by fib-DAC methodology
Author(s)
Auerswald, E.
Vogel, D.
Michel, Bernd
Rzepka, Sven
Mainwork
Smart systems integration for micro- and nanotechnologies
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
