• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Integration of optical interconnects and optoelectronic elements on wafer-scale
 
  • Details
  • Full
Options
2000
Journal Article
Title

Integration of optical interconnects and optoelectronic elements on wafer-scale

Abstract
The uv-reaction molding technology enabling for the fabrication of microoptical elements with rectangular, triangular or circular cross-sections (waveguides, prisms, lenses) in optical polymers is described. Multimode waveguide optical interconnects, coupling prisms and holding structures for fibers can be fabricated in one step. A three-dimensional monomode waveguide interconnection module is presented. Stability tests of the microoptical elements are reported.
Author(s)
Dannberg, P.
Erdmann, L.
Krehl, A.
Wächter, C.
Bräuer, A.
Journal
Materials Science in Semiconductor Processing  
DOI
10.1016/S1369-8001(00)00070-6
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • optical interconnection

  • waveguide

  • polymer

  • replication

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024