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Potenzen des Puls-Magnetron-Sputterns (PMS)
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1995
Journal Article
Title
Potenzen des Puls-Magnetron-Sputterns (PMS)
Author(s)
Schiller, S.
Goedicke, K.
Kirchhoff, V.
Metzner, C.
Journal
Vakuum in Forschung und Praxis
DOI
10.1002/vipr.19950070409
Language
German
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP