1999
Journal Article
Title

Properties of sputtered and sol-gel deposited PZT thin films for sensor and actuator applications

Title Supplement
Preparation, stress and space charge distribution, self poling
Author(s)
Gerlach, G.
Suchaneck, G.
Köhler, R.
Sandner, T.
Padmini, P.
Krawietz, R.
Pompe, W.
Frey, J.
Jost, O.
Schönecker, A.
Journal
DOI
Language
English