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Properties of sputtered and sol-gel deposited PZT thin films for sensor and actuator applications
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1999
Journal Article
Title
Properties of sputtered and sol-gel deposited PZT thin films for sensor and actuator applications
Title Supplement
Preparation, stress and space charge distribution, self poling
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Author(s)
Gerlach, G.
Suchaneck, G.
Köhler, R.
Sandner, T.
Padmini, P.
Krawietz, R.
Pompe, W.
Frey, J.
Jost, O.
Schönecker, A.
Journal
Ferroelectrics
DOI
10.1080/00150199908214904
Language
English
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS