English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Advances in silicon to glass bonding with laser
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2001
Conference Paper
Title
Advances in silicon to glass bonding with laser
Author(s)
Wild, M.J.
Gillner, A.
Poprawe, R.
Fraunhofer-Institut für Lasertechnik ILT
Mainwork
MEMS design, fabrication, characterization, and packaging
Conference
Conference "MEMS Design, Fabrication, Characterization, and Packaging" 2001
DOI
10.1117/12.425293
Language
English
Fraunhofer-Institut für Lasertechnik ILT
