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Functional epoxy polymer for direct nano-imprinting of micro optical elements
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2012
Poster
Title
Functional epoxy polymer for direct nano-imprinting of micro optical elements
Title Supplement
Poster at NNT 2012, 11th International Conference on Nanoimprint & Nanoprint Technology, Napa, California
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Author(s)
Fader, Robert
Landwehr, Johannes
Rumler, Maximilian
Rommel, Mathias
Frey, Lothar
Bauer, A.J.
Völkel, Reinhard
Brehm, Markus
Kraft, Andreas
Conference
International Conference on Nanoimprint & Nanoprint Technology (NNT) 2012
DOI
10.24406/publica-fhg-377601
File(s)
001.pdf (2.51 MB)
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Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Keyword(s)
nanoimprint
UV-SCIL
refractive index
nanoparticle
micro optic