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Deposition of superhard amorphous carbon films by pulsed vacuum arc
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1996
Konferenzbeitrag
Titel
Deposition of superhard amorphous carbon films by pulsed vacuum arc
Author(s)
Schultrich, B.
Scheibe, H.J.
Siemroth, P.
Hauptwerk
5th International Conference on Plasma Surface Engineering 1996. Book of abstracts
Konferenz
International Conference on Plasma Surface Engineering 1996
Language
Englisch
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