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Sputtering - a key technology for thin film coatings in crystalline silicon solar cell production
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2000
Conference Paper
Title
Sputtering - a key technology for thin film coatings in crystalline silicon solar cell production
Author(s)
Krempel-Hesse, J.
Preu, Ralf
Lautenschlager, Harald
Lüdemann, Ralf
Mainwork
Society of Vacuum Coaters. 43rd Annual Technical Conference 2000. Proceedings
Conference
Society of Vacuum Coaters (Annual Technical Conference) 2000
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE
