Two-step plasma texturing process for industrial solar cell manufacturing

This study describes the development of a two-step SF6/O2 texturing process using an inline industrial-type plasma system with combined microwave and radiofrequency excitation. It is shown that efficient texturing of polished (100), (111) and multicrystalline surfaces is possible. Multicrystalline silicon solar cells are processed proving an average efficiency gain of 0.2 % absolute compared to standard acidic texturing. With an improved sur­face passivation even a gain of 0.4 % absolute is achieved.