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Process simulation for advanced large area optical coatings
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2003
Conference Paper
Title
Process simulation for advanced large area optical coatings
Author(s)
Pflug, A.
Szyszka, B.
Sittinger, V.
Niemann, J.
Mainwork
Society of Vacuum Coaters. 46th Annual Technical Conference 2003. Proceedings
Conference
Society of Vacuum Coaters (Annual Technical Conference) 2003
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
Keyword(s)
reactive deposition
sputter deposition
sputtering target
process simulation
