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Fabrication and investigation of nanometer sized dielectric interdigitated transducers for detection of biomolecular binding
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1996
Conference Paper
Title
Fabrication and investigation of nanometer sized dielectric interdigitated transducers for detection of biomolecular binding
Author(s)
Paeschke, M.
Buchmann, L.M.
Seitz, R.
Hintsche, R.
Mainwork
Micro System Technologies '96
Conference
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 1996
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
