New materials equipped with functional surface features via novel composite coatings deposited using atmospheric PECVD

In this work, a new type of anti-sticking atmospheric PECVD coatings based on composite materials is presented. The coatings produced using process gases with two different silicon-containing precursors feature a good adhesion to the substrate material and at the same time an excellent anti-sticking behaviour to various polymers. Such coatings can be deposited on lamination plates where the coatings can potentially help to realize a better structure resolution and make possible the use of new lamination polymers.