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  4. Low temperature PVD for hard coating of dielectric materials
 
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1995
Conference Paper
Titel

Low temperature PVD for hard coating of dielectric materials

Author(s)
Leonhardt, G.
Falz, M.
Kuhn, M.
Lunow, T.
Lopez, E.
Wilberg, R.
Scheibe, H.J.
Hauptwerk
Society of Vacuum Coaters. 38th Annual Technical Conference 1995. Proceedings
Konferenz
Society of Vacuum Coaters (Annual Technical Conference) 1995
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Language
English
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