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  4. Low cost electroless copper metallization of BCB for high-density wiring systems
 
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1999
Conference Paper
Titel

Low cost electroless copper metallization of BCB for high-density wiring systems

Abstract
A technology development of a fully additive and selective metallization process for a structured Copper metallization on BCB was evaluated. Today semiadditive processes including vacuum steps are the most common thin film metallization technologies. Reducing the number of process steps and avoiding sputtering processes will reduce the cost of interconnection technologies for all varieties of electronic packaging.
Author(s)
Töpper, M.
Stolle, T.
Reichl, H.
Hauptwerk
International Symposium on Advanced Packaging Materials 1999: Processes, Properties and Interfaces. Proceedings
Konferenz
International Symposium on Advanced Packaging Materials 1999
Thumbnail Image
DOI
10.1109/ISAPM.1999.757312
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
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