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  4. Remote coupling over 93 mym using ARROW waveguides in strip configuration
 
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1994
Journal Article
Titel

Remote coupling over 93 mym using ARROW waveguides in strip configuration

Abstract
A novel waveguide coupler consisting of two antiresonant reflecting optical waveguides in strip-configuration has been developed on Si-SiO2-SiON basis. Remote coupling over a distance of 93 mym has been demonstrated experimentally.
Author(s)
Gehler, J.
Bräuer, A.
Karthe, W.
Zeitschrift
Electronics Letters
Thumbnail Image
DOI
10.1049/el:19940155
Language
English
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Fraunhofer-Institut fĂ¼r Angewandte Optik und Feinmechanik IOF
Tags
  • e-beam

  • Elektronenstrahllitho...

  • integrated optic

  • integrierte Optik

  • remote coupler

  • Richtkoppler

  • RIE

  • siliconoxinitrid

  • Siliziumoxinitrid

  • Streifen-ARROW

  • strip-ARROW

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