A New Approach to In-Situ Formtest-Interferometry

Interferometry is a common method for testing the form of ultra-precise components. However interferometrical measurements are very sensitive to
external influences. Due to this reason, in-situ measurements are very difficult to perform, especially in the vicinity of production processes. In this paper we present a new concept for the integration of interferometers in a machine tool and first results of the analysis of fundamental influences on interferometers operated in-situ.