Arrays of Sensors with Variable Stiffness

2007

Conference Paper

Author(s)

Shaporin, A.V.

Seifert, M.

Hanf, M.

Hiller, K.

Frühauf, J.

Gessner, T.

Dötzel, W.

Hauptwerk

Smart systems integration 2007

Konferenz

European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2007