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Nd-YAG laser annealing of gallium-implanted silicon.
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1981
Journal Article
Title
Nd-YAG laser annealing of gallium-implanted silicon.
Other Title
Laserausheilung von Silizium implantiert mit Gallium
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Author(s)
Takai, M.
Tsou, S.C.
Tsien, P.H.
Roeschenthaler, D.
Ryssel, H.
Journal
Journal of applied physics
Language
English
IFT
Keyword(s)
annealing
Gallium
implantation
Laser
Rekristallisation
Silizium