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FIB/SEM analysis for smart systems integration
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2012
Conference Paper
Title
FIB/SEM analysis for smart systems integration
Author(s)
Waechtler, T.
Auerswald, E.
Hoebelt, I.
Nowack, M.
Noack, Elke
Gollhardt, A.
Vogel, D.
Michel, Bernd
Schulz, Stefan E.
Geßner, Thomas
Mainwork
Smart Systems Integration 2012. CD-ROM
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2012
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
