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Fabrication of embedded micro-channels by intended under-etching and trench filling
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2005
Conference Paper
Title
Fabrication of embedded micro-channels by intended under-etching and trench filling
Author(s)
Jia, Chenping
Wiemer, Maik
Müller, R.
Otto, Thomas
Geßner, Thomas
Mainwork
Micro System Technologies 2005
Conference
International Conference on Micro Electro, Opto, Mechanical Systems & Components 2005
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS