Transition metals in SiC polytypes, as studied by magnetic resonance techniques

A review is given on the results of magnetic resonance studies of transition metal impurities in SiC polytypes. The data are presented for the elements titanium (Ti), vanadium (V), chromium (Cr), molybdenum (Mo), manganese (Mn), scandium (Sc) and copper (Cu). Most of these transition metals were found to occur in multiple charge states, underlining their role as deep level defects in SW. A compilation of relevant ESR parameters for transition metal defects in various SiC polytypes is presented in the Appendices.