Large area pulsed laser deposition of ceramic films

Large area pulsed laser deposition of alumina on stainless steel with Ar or Ar/O2 mixtures as processing gas in investigated using excimer laser radiation. The high area coveraging was achieved by a simultaneous movement of target and substrate in combination with the use of a certain power density distribution achieving a special angular distribution of the vapour/plasma plume. The chemical properties of the films were studied by X-ray photoelectron spectroscopy, and the morphology and uniformness by optical microscopy and ellipsometry.