English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Have you forgotten your password?
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Fabrication of field emitter array using focused ion and electron beam induced reaction
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1998
Conference Paper
Title
Fabrication of field emitter array using focused ion and electron beam induced reaction
Author(s)
Takai, M.
Kishimoto, T.
Morimoto, H.
Park, Y.K.
Lipp, S.
Lehrer, C.
Frey, L.
Ryssel, H.
Hosono, A.
Kawabuchi, S.
Mainwork
Micro- and nanoengineering 97 - MNE. Proceedings of the International Conference on Micro- and Nanofabrication 1997
Conference
International Conference on Micro- and Nanofabrication (MNE) 1997
DOI
10.1016/S0167-9317(98)00105-1
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB