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Integrated MEMS solutions for biomedical applications
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2010
Conference Paper
Title
Integrated MEMS solutions for biomedical applications
Author(s)
Trieu, H.-K.
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Mainwork
NANOSENS 2010, Nanosensors for industrial applications
Conference
International Conference on NANOSENS 2010
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Keyword(s)
MEMS
micro implant
biosensor
biohybrid system
pressure sensor
