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Simulation of thermal oxidation and diffusion processes by parallel PDE solver LiSS
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1998
Conference Paper
Title
Simulation of thermal oxidation and diffusion processes by parallel PDE solver LiSS
Author(s)
Hackenberg, M.
Joppich, W.
Mijalkovic, S.
Sontowski, T.
Mainwork
SISPAD 98. Simulation of semiconductor processes and devices
Conference
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 1998
Language
English
Fraunhofer-Institut für Algorithmen und Wissenschaftliches Rechnen SCAI
