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  4. Analysis and simulation of super-hydrophobic layers for micro-fluidic applications
 
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2018
Conference Paper
Title

Analysis and simulation of super-hydrophobic layers for micro-fluidic applications

Abstract
In this work, super-hydrophobic coatings are investigated for drop transport with electrowetting-on-dielectric (EWOD). At first, the basics of EWOD are shown. Then the impact of decreasing the thickness of the dielectric layer and using super-hydrophobic coatings on the actuation voltage Vmin for drop transport is presented. In the last part, simulation results made with COMSOL Multiphysics Ⓡ are shown and the results are discussed.
Author(s)
Türk, Semih
Uni DuE / EBS
Jupe, Andreas
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Viga, Reinhard
Uni DuE / EBS
Vogt, Holger
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Mainwork
Mikro-Nano-Integration. Beiträge des 7. GMM-Workshops 2018. CD-ROM  
Project(s)
EWALD
Funder
Deutsche Forschungsgemeinschaft DFG  
Conference
Workshop Mikro-Nano-Integration 2018  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • electrowetting-on-dielectric (EWOD)

  • atomic layer deposition (ALD)

  • microstructured surface

  • wetting behaviour

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