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Bistable microvalve with pneumatically coupled membranes
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1996
Conference Paper
Title
Bistable microvalve with pneumatically coupled membranes
Author(s)
Wagner, B.
Quenzer, H.J.
Hoerschelmann, S.
Lisec, T.
Jürss, M.
Mainwork
International Workshop on Micro-Electro-Mechanical Systems 1996. Proceedings
Conference
International Workshop on Micro-Electro-Mechanical Systems (MEMS) 1996
DOI
10.1109/MEMSYS.1996.494012
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
