English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Have you forgotten your password?
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Bistable microvalve with pneumatically coupled membranes
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1996
Conference Paper
Title
Bistable microvalve with pneumatically coupled membranes
Author(s)
Wagner, B.
Quenzer, H.J.
Hoerschelmann, S.
Lisec, T.
Jürss, M.
Mainwork
International Workshop on Micro-Electro-Mechanical Systems 1996. Proceedings
Conference
International Workshop on Micro-Electro-Mechanical Systems (MEMS) 1996
DOI
10.1109/MEMSYS.1996.494012
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
