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Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process
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1994
Conference Paper
Title
Aspects of TiN and Ti deposition in an ECR plasma enhanced CVD process
Author(s)
Weber, A.
Mainwork
Materials Research Society. Fall Meeting '94. Proceedings
Conference
Materials Research Society (Fall Meeting) 1994
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST