Miniaturized FTIR-spectrometer based on optical MEMS translatory actuator

In this paper we present a MOEMS based miniaturized Fourier-transform infrared (FTIR) spectrometer capable to perform time resolved measurements from NIR to MIR. The FTIR-spectrometer is based on a MOEMS translatory actuator which replaces the macroscopic mirror drive enabling a miniaturized, robust and low cost FTIR system. The MOEMS device is manufactured in a CMOS compatible process using SOI technology. Due to the electrostatic driving principle based on in-plane electrode combs, 200 µm stroke can be achieved with comparatively low voltages (<40 V) at an ambient pressure below 500 Pa. The actuator plate, acting as mirror with an area of 1.65 mm2, operates at a resonant frequency of 5 kHz. Consequently this yields a maximum spectral resolution of 25 cm-1 and an acquisition time of 200 µs per spectrum. Based on a Michelson setup the infrared optical bench of the presented FTIR system is designed to account for the mirror aperture and the desired spectral bandwidth of 2 µm to 5 µm. The integrated signal processing electronics has to cope with a bandwidth of 8 MHz as a result of the mirror motion. A digital signal processor manages system control and data processing. The high acquisition rate and integration level of the system makes it appropriate for applications like process control and surveillance of fast reactions. First results of transmission and absorbance measurements are shown. In addition we present a novel MOEMS device with increased mirror aperture and stroke which will be used for further optimization of the spectral FTIR-resolution.