Combinatorial fabrication of thin film-libraries and evaluation of their piezoelectricity by ultrasonic piezo-mode imaging

Piezoelectric materials are used in an ever increasing number of technical products. The need for new and improved piezoelectric materials is growing rapidly. Conventional methods are too slow to explore the potential parameter spaces. A combinatorial workflow has been developed to produce mixed oxide thin film libraries and screen them for piezoelectric properties by atomic force microscopy in the ultrasonic piezo-mode. Validation and new findings are reported. Determination of piezoelectric properties in an automated fashion was only possible within the same class of materials.