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  4. Nano particle production by laser ablation and metal sputtering on Si-wafer substrate
 
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2015
Conference Paper
Title

Nano particle production by laser ablation and metal sputtering on Si-wafer substrate

Abstract
This research relates to methods of deposition and patterning a surface with nano sputtered particles by Laser. The method is mask-less and without vacuum requirement which can be used in wire bonding and microelectronics devices.
Author(s)
Azhdast, M.H.
Azdasht, G.
Lüdeke, H.
Lang, K.-D.
Glaw, V.
Mainwork
Advanced Solid State Lasers 2015  
Conference
Conference "Advanced Solid State Lasers" (ASSL) 2015  
DOI
10.1364/ASSL.2015.AM5A.3
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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