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Realization of CMUT based ultrasonic sensor systems
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2014
Conference Paper
Title
Realization of CMUT based ultrasonic sensor systems
Author(s)
Unamuno, Anartz
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Klemm, Markus
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Grüger, Heinrich
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Mainwork
Smart Systems Integration 2014
Conference
Smart Systems Integration Conference (SSI) 2014
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2014
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
